Experience Precision with the Active Vibration Microscope Laser Handheld Interferometer:

Revolutionizing Semiconductor Manufacturing: Our Linear Active Vibration Isolation Unit, controlled by linear motors, enhances productivity in semiconductor manufacturing and inspection.

Combining the Best of Both: This active vibration isolator combines the strengths of linear motor control and pneumatic control types, ensuring optimal performance.

Major applications ・Semiconductor Manufacturing Equipment ・Inspection Equipment

Exceptional Vibration Control: Our unique control system delivers outstanding vibration isolation and damping, facilitated by high-thrust linear motors and motion feed-forward control.

Minimal Air Consumption: Benefit from reduced air consumption and superior anti-vibration performance, enhancing overall efficiency in vibration control applications.

Superior Performance: With pre-inputted stage movement information and advanced vibration-damping capabilities, our active unit guarantees superior vibration isolation performance.

Upgrade your laboratory with our Active Vibration Microscope Laser Handheld Interferometer, the pinnacle of precision and productivity.